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VACO 250 Evaporation

I. Introduction Haut CMI

The machine VACO 250 is a retrofited evaporator.

VACO 250
Evaporator VACO 250

VACO 250
Evaporator VACO 250

II. Sources Haut CMI

3 resistance heated sources (Joule effect) are available.

VACO 250
Evaporator VACO 250 : 3 boats

VACO 250
Evaporator VACO 250 : boats and shutters

III. Capacity Haut CMI

The capacity is 3 wafers 100mm diameter.

VACO 250
Evaporator VACO 250 : substrate holder for 3 wafers 100mm diameter