Reservation  -     

Center of MicroNanoTechnology CMi

nLoF spin

 

 Use the blinking arrows to step back or forward between the process steps

 

 

nLOF 2020 coating

AZ nLOF 2020 on EVG 150

Standard programs (single layer coating) are listed below: Database file name: nLOF_2020_Std_2_0

Recipe name Spin speed [rpm] PR thickness [m] Alternate Options
nLOF_2020_1um4  6000 1.4 NoEBR
nLOF_2020_1um6 4300 1.6 NoEBR
nLOF_2020_2um 2850 2.0 NoEBR
nLOF_2020_2um4 2000 2.4
NoEBR
nLOF_2020_3um 1350 3.0 NoEBR

Spin time is 40s, followed by 10s stress relaxation at 0 RPM. No backside rinse.
Softbake at 50m proximity for 1m15s. Softbake temperature is 110.

Alternate databases are available for specific situations :

AZ nLOF 2020 on manual coaters

Please use the following spincurve when selecting the rotation speed to achieve a specific thickness. Spin time should be 45 seconds minimum. A low RPM spreading step is recommended for nLOF 2020.

   AZ nLOF 2020 Spincurve

On a contact hotplate, the softbake temperature should be 105C and softbake time 60 seconds.