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AZ ECI 3000 spin

 

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AZ ECI 3000 Coating

 

AZ ECI 3000 on ACS200 Gen 3

On the ACS200 Gen 3 coater, standard coating sequences are identified by a four digit code "XXXX". The first two digits identify the options (surface treatment, edge bead removal, ...) while the last two digits identify the resist (AZ ECI 3007 or AZ ECI 3027) and thickness.

First digits Coating option --> Last digits Spin speed [rpm] Softbake time [mm:ss] PR thickness [µm]
01XX
HMDS / NoEBR (topEC) XX21 5800 (ECI 3007) 01:30
0.6
02XX
Dehydrate / NoEBR (topEC) XX22 3700 (ECI 3007) 01:30
0.75
03XX
HMDS / EBR XX23 2050 (ECI 3007) 01:30
1
04XX
Dehydrate / EBR XX24 1300 (ECI 3007) 01:30
1.2
  XX25 850 (ECI 3007) 02:00
1.5
XX26 6000 (ECI 3027) 02:00
2
XX27 3700 (ECI 3027) 02:30
3
XX28 1750 (ECI 3027) 02:30
4
XX29 1200 (ECI 3027) 02:30
5

Spin time depends on the spin speed and viscosity of the resist. Softbake is performed at minimum proximity. Softbake temperature is 100°C for all options.

Alternate coating sequences (for different bake temperatures, spin speed, or options) can be edited based on user's requests. Please contact the photolithography staff for guidance.

AZ ECI 3000 on RiteTrack 88

Two different grades of AZ ECI 3000 are available on the RT 88 : AZ ECI 3007 (thin layers, 0.6 to 1.5 µm) and AZ ECI 3027 (thick layers, 2 to 5 µm). Standard recipes are listed below:

Recipe name Spin speed [rpm] PR thickness [m] Add Rehydratation Delay Default Option
C_AZ_ECI_0um6 5050 0.6 No BSR + EBR
C_AZ_ECI_1um0 1800 1 No BSR + EBR
C_AZ_ECI_1um2 1240 1.2 No BSR + EBR
C_AZ_ECI_1um5 800 1.5 No BSR + EBR
C_AZ_ECI_2um 6300 2 No BSR + EBR
C_AZ_ECI_3um 2800 3 Yes, 300s. BSR + EBR
C_AZ_ECI_4um 1600 4 Yes, 420s. BSR + EBR
C_AZ_ECI_5um 1000 5 Yes, 600s. BSR + EBR

Softbake is performed at 100m proximity. The softbake temperature is 115C and the softbake duration increases with the thickness of the film.

Alternate recipes are available for each thickness, without the EBR option: C_NoEBR_AZ_ECI_XumX

 

AZ ECI 3000 on manual coaters

Please use the following spincurves when selecting the rotation speed to achieve a specific thickness. Spin time should be 45 seconds minimum. A low RPM spreading step is not necessary for AZ ECI 3007, but is recommended for AZ ECI 3027.

   AZ ECI 3007 Spincurve
   AZ ECI 3027 Spincurve

On a contact hotplate, the softbake temperature should be 90°C and softbake time 30 seconds plus an additionnal 30 seconds per µm of resist.