Reservation  -     

Center of MicroNanoTechnology CMi

VPG200 conversion

 Convert layout

Heidelberg: design conversion software

Prepare your layout in your preferred layout editor, export/save to one of several more or less standard design interchange formats. The conversion software will analyse it and translate into Heidelberg's machine specific and proprietary "lic" format, "laser intermediate code", The conversion software is available on the desktop computer accompanying the each Himt laser writer. Tool specific parameters are automatically loaded (and updated) during the setup of the conversion . The following guide is for the vpg200:

Pattern transfer according to your processflow fix the geometry (justification) and polarity of data. Summary for mask and direct wafer writing are described in the following document: