Reservation  -     

Center of MicroNanoTechnology CMi

Pattern transfer - conceptual summary

 

Photolithography - pattern transfer

When transferring patterns, polarities and tones create confusion. Read and understand CMI's graphical summary. The talking points are the following:

Check out alternate points of view: Stanford Nanofabrication Facility: Photomask Basics, [local copy] It gives a better perspective.