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Center of MicroNanoTechnology CMi

 

EVG150 Recipes from Feb 2010 until now


Recipes are available with the following attributes:
- std: for silicon or non-transparent wafers
- Quartz: for quartz wafers - bakes are stronger due to low thermal conduction of quartz
- GlassOnly: for all other types of transparent wafers

Recipe name format: <resist family>_<thickness range>_<substrate type>_<version numbers>


AZ 1512 HS

Automatic dispense by Cybor 1
  AZ1512_1to2um_Std_1_5.ecp
  AZ1512_1to2um_GlassOnly_1_5.ecp
  AZ1512_1to2um_Quartz_1_5.ecp
AZ 1512 HS - Protection layer
Automatic dispense by Cybor 1
  AZ1512_BackSideProtect_GlassOnly_1_2.ecp
  AZ1512_BackSideProtect_Quartz_1_2.ecp
  AZ1512_BackSideProtect_Std_1_2.ecp
AZ 9260
Automatic dispense by Cybor 2
  AZ9260_5to14um_GlassOnly_5_3.ecp
  AZ9260_5to14um_Quartz_5_3.ecp
  AZ9260_5to14um_std_5_3.ecp
 
Automatic dispense by Cybor 2
AZ 9260 - No dehydration AZ9260_5to14um_std_NoDehydrate_5_3.ecp
  AZ9260_5to14um_Quartz_NoDehydrate_5_3.ecp
  AZ9260_5to14um_High_Topo_NoDehydrate_5_3.ecp
  AZ9260_5to14um_GlassOnly_NoDehydrate_5_3.ecp
AZ 9260 - Protection layer
Automatic dispense by Cybor 2
  DS_photoAZ9260_protectAZ1512_GlassOnly_1_1.ecp
  DS_photoAZ9260_protectAZ1512_Quartz_1_1.ecp
  DS_photoAZ9260_protectAZ1512_std_1_1.ecp
LOR - Double layer lift-off
Syringe installation required
  Lift-Off_LOR_GlassOnly_5_5.ecp
  Lift-Off_LOR_Quartz_5_5.ecp
  Lift-Off_LOR_Std_5_5.ecp
Single layer lift-off
Syringe installation required
  nLOF_grad0um7_1_1.ecp
Generic spray coat template
Syringe installation required
  SprayCoat_Std_1_1.ecp



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