Reservation  -     

Center of MicroNanoTechnology CMi

Yes III

Primer Oven YES III


Zone 1 loaded with HMDS; Prg #5 (23min / 10s prime)

Zone 6 loaded with HMDS; Prg #1 (23min / 10s prime)

Introduction

The prime oven allows batch priming of Si oxide (native or film) to enhance adhesion of polymers, such as positive photoresist. According to the equipment supplier the following compounds are commonly used for priming:

Two YES III priming ovens are installed at CMI BM-1:

In addition, an SSE VB20 hotplate for HMDS priming is available in Zone 13. Please check here for details.


Access login and booking

NO booking or access login is available. Please include a 25 min time interval in the coater booking period.

SAFETY

!  Hot  ! T = 125 °C:  The metal carrier maintains high temperature for several minutes. To move cassettes, use the handle available by the machine.


Standard user check list

 

Primer

Temp.

Prog. N (thumbwheel)

Zone 1

HMDS

125 C

5

Zone 6

HMDS

125C

1

Normal State: 

Temperature control:

Vacuum Gauge:

Sequencer:

Links:

Yes oven supplier: http://www.bita.lu/yes.htm

Application notes: http://www.yieldengineering.com/Portals/0/HMDS%20Application%20Note.pdf