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Center of MicroNanoTechnology CMi

Sawatec Negative Resine Coater

 

Sawatec LSM200
Negative Resist Coater

 



Manual coater for negative tone resists and polymers.

Introduction

LSM200 is a manual handling equipment for coating of negative tone photoresist or polymer. Special features are:

Precautions

Cross contamination: VAPOR OF SOLVENT DURING COATING AND SOFTBAKE

    Following restrictions are required to reduce damage on exposure equipments:

Sawatec LMS200: No restriction in normal operation. Use moderate solvent quantity for cleaning procedure
Softbake:
use cover protected hotplates (SAWATEC HP401Z or Dataplate only)
Hardbake: No restrictions

Access login and Booking

To prevent mixing of SU8 and Polyimide, observe strictly the configuration according to the booking calendar and the following images:


Default configuration for SU8 type resist: Start/stop button without configuration sign

Configuration for Polyimide resist: Start/stop button with PI sign

Simple recipe use and edition

A simple graphical interface is used to access recipes for use and edition.
Recipe consists of segments with spin speed, accelaration and time parameters.
No automatic dispense or wafer loading is installed.

Processing of thick negative resist can take a lot of time. In order to decrease waiting list, book equipments according to the following script:

Material order

Doses of various resin can be ordered using the usual reservation form http://cmisrv1.epfl.ch/reservation/userliv.php
Place order at least 24 hour in advance.