Reservation  -     

Center of MicroNanoTechnology CMi

Operation Manual for Suss MicroTec MJB4

Laurell Manual Coater Line for non-photosensitive Films

Laurell_Image

Precautions and Warnings

SOP validation: Any material that is being spin-coated on the Laurell Manual Coater must be approved by the CMi Staff! A standard operating procedure (SOP) is required and must be validated to use any new material on the system.

Cross-Contamination: Different materials with non-compatible chemistry are being coated on the Laurell coater. Make sure to clean the chuck after each working session and, if necessary, exchange aluminum foils in the coater bowl. A dedicated trash-bin is available to throw away contaminated material.

Table of content: CMI

  1. Introduction
  2. Equipment Description
  3. User Manuals
  4. Links

I. Introduction CMI

The Laurell Manual Coater line is equipped with a Laurell WS-650-23 spin-coating unit and two Präzitherm PZ 28-2 ET / PR 5 SR hotplate & controller units from Harry Gestigkeit GMBH. One hotplate is equipped with a cover and input for nitrogen gas for baking under N2 flow.

The Laurell coater line is dedicated to the coating of non-standard (i.e. other than nonolak-based photoresists) thin films. This includes but is not restricted to:

Because different materials with non-compatible chemistry are being coated on the Laurell coater, make sure to clean the chuck after each working session and, if necessary, exchange aluminum foils in the coater bowl. A dedicated trash-bin is available to throw away contaminated material.

II. Equipment description CMI

Laurell Manual Coater:

Chucks available: Three different chucks (or adaptator) for different wafer sizes:


4” chuck

Adaptator ring
for chips


6" chuck

Präzitherm hotplates:

III. User Manuals CMI

IV. Links CMI