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Center of MicroNanoTechnology CMi

How to be a member of CMi

An orientation procedure is requiered before any user get access to the CMi cleanroom. All the steps described here must be done.

I. Contact CMi

You must first send an e-mail to and give a brief description of the work you want to do in the cleanroom.
You will then receive an invitation to the Introduction course about Safety and Behaviour in cleanroom (next dates).
It is mandatory to follow this course even if you are already used to work in a cleanroom environment. The topics are : This course is followed by a visit of the cleanroom and facilities. It takes place once a month and takes around 2h30. You can download a copy of this presentation.

II. Prepare your process flow

An integrated microfabrication project always starts with the personal research of methods and processes usually used in cleanroom. The succession of the technological step constitutes a technological process which must be examined in details in order to check its compatibility with respect to : In order to evaluate your project, you must prepare a process flow and a runcard . Download these documents, complete them as accuratly as possible according to your work. On CMi web site, you will find a lot of information about available process you can do and equipment we have in the cleanroom. If you need help to prepare these documents, don't hesitate to contact section heads.

  • Process Flow : it is a document that presents the goal of your work, the technologies you need and a precise description - step by step - of the fabrication of your devices. In the document there are different sections :
    • Header : you give us the name of your lab or company, who will make the fabrication, the person who is responsible of your work, and your coordinates. You may also tell us if it is a Semestral project, Master project, PhD thesis or other like Post-Doctoral research of company project.
    • Description : you describe the goal of your project
    • Technologies used : you remove from the list all the technologies you will NOT use. Fill also the list of masks you need. Critical Dimension is the smallest feature you have on the mask and Critical Alignment is the accuracy you need for alignment. On our web site, in section "Process/Materials", you will find the kind of substrate you can buy to CMi.
    • Process outline : you describe each step accompanied of a cross section view of result expected
    + This document can be modified during the technical committee, and must be fixed at the begining of your work in the cleanroom.

  • Runcard : According to the process retained, a roadmap is drawn up by mentioning the equipment used, the principal parameters of the machines, measurements done and the possible distribution of the responsibilies respective to the users and the CMi.

  • + This document can be updated along you work in the cleanroom.

    III. Request a meeting with the Technical Committee

    To request a meeting with the Technical Committee, send your proposition of process flow to
    During this meeting, you will present the goal of your work, the process you want to do in details and the results you expect.
    CMi staff must know exactly the process of each user because :
    Every project must be submitted to technical committee even if it is not your first project.
    The technical committee can take place several times per week.
    At the end of this meeting, the training programm on the equipment will rise from the decisions taken.

    The technological committee of the CMi can ask the user some information about the results and the improvements made by the project in the purely technological field in order to :

    IV. Trainings on equipment

    To use the cleanroom equipment, it is mandatory to get trained on it. Trainings are made only on equipment needed according to the final process flow, and are done by CMi staff only. Once training has been done, users can reserve it via CMi web site (section "Reservation") and use it.
    To get a training on an equipment you must contact people responsible of the equipment.