Reservation  -     

Center of MicroNanoTechnology CMi

Processing Fees

Invoiced fees

Fees invoiced by CMi are the direct costs linked to the processing projects. They may include the costs of consumables as well as equipment usage:

  • Consumables are e.g. wafers, masks, precious metals and chemicals supply, tweezers, notebooks...
  • Equipment usage may include booking fees (if any) and hourly rates, that both are a shared contribution to the consumables necessary for equipment up-time. The balance between the booking fees and the hourly rates is adjusted for each processing tool in order to optimize and smooth CMi equipment usage.
  • For CMi members, applied fees are visible on their personal account, where invoices can also be live-checked.

    If needed, further details available upon request to infocmi@epfl.ch.

    Processing fees (CHF/h) listed by categories

    Categories EPFL Ext. Academics Industrials Process overcharge
    Billed separately
    Required consumables
    To be ordered online
    A1
    Laser Writer
    80.00
    120.00
    185.90
    A2
    Coater Developer (Auto)
    126.00
    160.00
    205.70
    A3
    Coater Developer (Manual)
    44.00
    47.00
    61.60
    Photo resist, SU8, PI bottles
    A4
    Mask Aligner
    74.00
    83.00
    105.60
    A5
    Hot Plate
    24.00
    25.00
    36.30
    B1
    E-Beam Writer
    68.00
    171.00
    323.40
    Ebeam resist bottles
    C1
    Dry Etcher
    39.00
    62.00
    99.00
    D1
    LPCVD
    76.00
    101.00
    132.00
    D2
    Thermal Process
    43.00
    48.00
    62.70
    D3
    PVD (Auto)
    56.00
    77.00
    117.70
    Precious metals
    D4
    PVD (Manual)
    37.00
    38.00
    45.10
    W boats, tubes of metal
    D5
    ALD
    76.00
    101.00
    132.00
    ALD precursor cycles
    E1
    SEM, FIB
    37.00
    56.00
    88.00
    E2
    AFM
    49.00
    65.00
    84.70
    AFM probes
    E3
    Other Measur. Tools
    55.00
    61.00
    75.90
    Prober needles
    F1
    Wet Bench
    56.00
    60.00
    86.90
    G1
    PDMS Line
    20.00
    21.00
    31.90
    PDMS crosslinker doses
    G2
    Packaging
    69.00
    77.00
    96.80
    G3
    Other Tools
    23.00
    24.00
    30.80
    Ink cartridges

    Students Practical Training Class

    Practical training classes are invoiced as standard academic projects (see below).

    Academic Users

    For PhD/Master/Semester students, EPFL researchers and external academics:

  • Tools rates are listed above.
  • Materials and consumables are charged.
  • Official EPFL registered students doing a semester project or a master thesis project (PDM) are eligible for subsidies:

  • Up to CHF 4K for master thesis project.
  • Up to CHF 1K for master semester project.
  • Up to CHF 0.5K for bachelor semester project.
  • Incoming exchange students:

  • Up to CHF 4K per year with a maximum of CHF 1k per month.
  • Industrial Users

  • Companies sign an access contract.
  • Companies pay an access fee of CHF 500.- / month at the first equipment usage in the month.
  • Tools rates are listed above.
  • Materials and consumables are charged.
  • CMi Services

    CMi is primarily a user lab but the CMi staff may carry out manufacturing processes according to the availability of the staff and the equipment. Jobs performed by the staff are invoiced based on real consumption and include consumables, equipment usage and staff hourly rate. Handling, packaging, freight costs are charged for each service. For industrial users the 500.- CHF monthly access fee applies. Estimation of processing and labour time is available upon request.

    Labour costs (CHF/h) listed by categories

    Categories EPFL Ext. Academics Industrials
    A1
    Laser Writer
    75.00
    150.00
    225.00
    A2
    Coater Developer (Auto)
    75.00
    150.00
    225.00
    A3
    Coater Developer (Manual)
    60.00
    120.00
    180.00
    A4
    Mask Aligner
    75.00
    150.00
    225.00
    A5
    Hot Plate
    52.00
    104.00
    156.00
    B1
    E-Beam Writer
    90.00
    180.00
    270.00
    C1
    Dry Etcher
    75.00
    150.00
    225.00
    D1
    LPCVD
    75.00
    150.00
    225.00
    D2
    Thermal Process
    75.00
    150.00
    225.00
    D3
    PVD (Auto)
    60.00
    120.00
    180.00
    D4
    PVD (Manual)
    60.00
    120.00
    180.00
    D5
    ALD
    75.00
    150.00
    225.00
    E1
    SEM, FIB
    75.00
    150.00
    225.00
    E2
    AFM
    75.00
    150.00
    225.00
    E3
    Other Measur. Tools
    75.00
    150.00
    225.00
    F1
    Wet Bench
    52.00
    104.00
    156.00
    G1
    PDMS Line
    75.00
    150.00
    225.00
    G2
    Packaging
    60.00
    120.00
    180.00
    G3
    Other Tools
    60.00
    120.00
    180.00

    Handling, packaging, freight costs

    Designation Prices (CHF)
    Handling, packaging, freight costs (La Poste CH)
    50.00
    Handling, packaging, freight costs (Fedex)
    100.00
    Handling, packaging, freight costs (Customer's account)
    40.00

    Rules for refund demand in case of equipment failure

    Generale rules

    What to do for refund demand

    1. The user immediately reports to CMi staff so the concerned equipment can be checked and preventively put to maintenance state.
    2. The user sends an email to the staff member in charge the same day with:
      • User login
      • Machine
      • Date
      • Time
      • Related process flow document mentioning the concerned process step
      • If possible, a picture of the sample
      • The requested adjustment of the invoice
    3. The user transmits the sample to the staff in charge for inspection.
    4. If applicable, the user checks the ongoing invoice that agreed refund is effective, before the billing at the end of the month.