Reservation  -     

Center of MicroNanoTechnology CMi

Metrology

AFM

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   Bruker Atomic Force Microscope
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FIB / SEM / EDX

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   FEI Nova 600 NanoLab, dual beam (SEM/FIB)
   Zeiss LEO 1550, scanning electron microscope
   Zeiss MERLIN, scanning electron microscope and EDX analysis

XPS / AES available at MHMC

   X-ray Photoelectron Spectroscopy
   Auger Electron Spectroscopy
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Mechanical profilometers

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  Tencor Alpha-Step 500, surface profiler
  Bruker Dektak XT, surface profiler
   Nikon DIGIMICRO, feeler
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Optical measurement

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   Krss DSA-30E, Contact Angle Measurement tool
   Sopra GES 5E, spectroscopic ellipsometer
   Veeco Wyko NT1100, optical profiler
   Nanospec AFT-6100, spectroscopic reflectometer
   FilMetrics F20-UV, spectroscopic reflectometer and transmittometer
   Toho Technology FLX 2320-S - Thin Film Stress Measurement tool
   Bruker VERTEX70 FT-IR Spectrometer
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Electrical measurement

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   KLA Tencor OmniMap RS75, resistivity meter four-point measurements
   Suss PM8, manual prober station
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Optical microscopy

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   Nikon Optiphot 200, inspection microscope
   Nikon Optiphot 200, inspection microscope
   Nikon Optiphot 150, inspection microscope
   Nikon MM 40, inspection and 2-D metrology microscope
   Nikon Optiphot 200, inspection microscope
   Nikon Optiphot 150, inspection microscope
   Mitutoyo, inspection microscope
   Nikon Eclipse LV150 microscope - zone 06
   Nikon Optiphot 200 inspection microscope - zone 15
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