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Dektak XT mechanical profiler

Dektak XT

Table of content: CMI

  1. Introduction
  2. Performing a measurement
  3. Settings on the measurement options tab
  4. Quick step-by-step

Printable Usermanual is available here

NEW: Tutorial for setting-up a measurement recipe with database here.
The offline software Vision64 for the data treatment can be directly downloaded from the network: "\\cmisrv1\@public\Vision64".

I. Introduction CMI

The DektakXT stylus surface profiler is an advanced thin and thick film step height measurement tool with the following characteristics:
  • Equipment compatible with 2'', 4'', 6'' and 8'' wafers
  • Selectable magnification, 1 to 4mm FOV
  • Scan Length Range 55 mm with stitching option
  • Vertical range 1 mm
  • Step-height repeatability of 5A
  • N-Lite+ Low Force with 0.03 to 15mg
  • 3D stress and 3D mapping
  • II. Performing a measurement CMI

    1. Open the software Vision64, then click OK for the XY initialization and then OK for the Theta initialization and wait for the main window.
    2. Dektak home page

    3. Click the Unload sample button on the toolbar above the live Video Display to move the scan stage forward, then place the sample on the fixture and put the Vacuum on.
    4. NEVER touch the stylus, this may cause damages!



    5. Click the Load Sample button to move the scan stage backward to its home position.
    6. Click the Tower down button.
    7. Adjust the illumination level of the video image by moving the slider on the Intensity Bar.


    8. Adjust the focus level of the video image by moving the slider on the Focus Bar at the bottom of the left pane of the Live Video Display.


    9. Before starting the measurement, you must place the area of interest of the sample under the stylus by adjusting the position of the motorized XY sample-positioning stage and its Theta orientation (rotation of the sample). This is done by a mouse click and drag on the XY and Theta control panels, respectively. In both cases, different speeds are available.
    10. Note: When you look at the video, the stylus scans the sample from the bottom to the top


    11. Click on Measurement Setup and define the measurement parameters (see Settings).
    12. Click on Single Acquisition for the measurement.
    13. At the end of the measurement, the Data Analysis windows appears.
    14. To do a levelling, activate Terms Removal (F-Operator) in the Data Analyzer window on the right.


      Then place the two cursors (R and M), right click and select Level Two Point Linear.


      When you proceed to an height measurement, place the cursors (R and M) on the two points you want to measure:


    15. To quit the equipment, click on the icon Measurement Setup, click on Tower Home button and then Unload Sample button.


    16. Exit the program Vision 64.

    III. Settings on the measurement options tab CMI

    Scan type

  • Standard Scan A normal scan type in which the scan is performed across the surface of a sample. Because a tower reset occurs before each measurement, each successive scan has its own reference point.
  • Static Tower Scan A special scan type in which the scan is performed across the surface of a sample, but the tower reset occurs only before the first measurement. Each successive scan therefore uses the same initial reference point.
  • Static Scan A special scan type in which several scans are performed at a given location. (The stage does not move.) The tower reset occurs before the measurement sequence. This scan type is primarily used for determining the noise and the drift of the system.
  • Map Scan If your system includes the 3D Mapping Option, select this scan type to measure, analyze, and view surface contour data in three dimensions (X, Y, and Z).

  • Range

    Enter a value that indicates vertical resolution of the scan. When measuring extremely fine geometries, the 6.5 um range provides a vertical bit resolution of 0.1 nm.
    For general applications, the 1.0 nm vertical resolution of the 65.5 um range is usually adequate.
    When measuring thick films or very rough or curved samples, select the 524 um range with 8.0 nm resolution.

    Profile

  • Valleys Provides 90% of the measurement range below the zero horizontal grid line. This option is used primarily for measuring etched steps.
  • Hills and Valleys Provides 50% of the measurement range above the zero horizontal grid line and 50% below. This option is used in most applications, especially if the surface characteristics of the sample are not well known, or if the sample is out of level.
  • Hills Provides 90% of the measurement range above the horizontal grid line. This option is used primarily for measuring steps heights.
  • Stylus type

    Select the currently installed stylus type from the drop-down list.

    Stylus force

    Enter a value between 1mg and 15mg.

    Length

    Enter a scan length between 50 um and 55,000 um (55 mm) for a non-stitched measurement.

    Duration

    Enter amount of time it will take to complete a given scan. Scan duration, in conjunction with scan length, determines the horizontal resolution of a scan. For most applications, a 10 – 20 second scan provides adequate resolution and throughput.

    Resolution

    Enter the horizontal resolution for the scan length and scan duration. The scan resolution is expressed in um/sample, indicating the horizontal distance between data points.

    Sample

    Indicates the number of data points that the system should take on the sample during a measurement.

    Speed

    Indicates the scan speed in units of um/s.

    Tower Up After Scan

    Select this check box to make the DektakXT stylus profiler automatically raise the tower to a safe position after each scan.

    Use Soft Touchdown

    If your system includes the 3D Mapping Option, select this check box to make the DektakXT stylus profiler increment the stylus force up to the specified value. This causes the stylus to descend more slowly, thus minimizing the possibility of scratching the sample.

    IV. Quick step-by-step CMI

  • Load your sample.
  • Move the stylus down in contact with the sample, the move it to its Up position.
  • Adjust the Intensity and Focus if necessary.
  • Adjust the position of the X-Y and Theta stage until you find the location of interest on your sample.
  • Fine-position the location of interest in the center of the Live Video Display.
  • On the Measurement Options tab of the Measurement Setup window, select Standard Scan.
  • Modify settings in the Measurement Setup window.
  • Click the Measurement button on the Ribbon and then select Measurement.
  • At the end of the measurement, the Data Analysis window appears.
  • To do a levelling, activate Terms Removal (F-Operator) in the Data Analyzer window on the right. Then place the two cursors (R and M), click right, and click Level Two Point Linear.
  • To quit the equipment, click on the icon Measurement Setup, click Stylus Home Position, then Unload Wafer.
  • Exit the program Vision 64