Reservation  -     

Center of MicroNanoTechnology CMi

FEI Nova 600 Nanolab



The Nova 600 NanoLab is a Dual Beam SEM / FIB for nanoscale prototyping, machining, characterization and analysis. It combines ultra-high resolution field emission Scanning Electron Microscopy (SEM) and precise Focused Ion Beam (FIB) etch and deposition.