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FilMetrics F20 UV - Spectroscopic Reflectometer (with Transmittometer option)

FilMetrics F20 UV

Table of content: CMI

  1. Introduction
  2. Performing a measurement quickly

I. Introduction CMI

The FilMetrics F20-UV is used to measure the thickness and optical constants (n and k) of dielectric and semiconductor thin films.

Measured films must be optically smooth and within the thickness range set by the system configuration requirements:

  • Thickness measurement : Thickness range from 1nm to 40µm
  • Thickness and n and k measurement : Thickness range : from 50nm and up
  • Wavelength range : 200nm - 1100nm
  • Spot size : 1.5mm
  • Measurement of Single layers
  • Measurement of Multilayer stacks
  • Commonly measured films include semiconductor process films such as oxides, nitrides, resists and poly-silicon, optical coatings such as hardness and anti-reflection coatings, polyimides, ...

    FilMetrics F20 UV

    II. Performing a measurement quickly CMI

    1. Switch the light sources on. There are two bulbs in the UV light source. Be sure to activate both of them (Deuterium Lamp + Halogen Lamp).
    2. Switch the shutter open.
    3. FilMetrics F20 UV

    4. Launch the FilMeasure program.
    5. Select a film recipe from the drop-down menu on the right side of the main screen.
    6. Click the "Edit Recipe" button to preview the recipe. Check to see that the film sequence matches that of the actual sample. If not, different films can be selected or a different initial thickness guess can be entered. Save (or click OK) and close.
    7. Click on the Baseline button. Place the reference wafer on the stage. Specify the Reference Material. Follow the instructions in the dialog boxes.
    8. Place the sample to measure on the stage and click "Measure". FilMeasure will then acquire the reflectance spectrum and calculate the corresponding thickness(es). If the measurement was succesful, the minima and the maxima of the calculated reflectance (the red line on the graph) will coincide in wavelength with the minima and the maxima of the measured reflectance (the blue line on the graph).

    III. Using the transmittance option CMI

    The FilMetrics F20-UV is a spectroscopic reflectometer, and has an option to function as a spectroscopic transmittometer. Only use it in transmission mode if you have been instructed on how to do so. When you leave the equipment, it must be back in reflectance mode.

  • Be very careful when manipulating the optical fibre: it is made out of glass, is fragile and will break eventually.
  • Do not remove the fibre leading to the bottom from the stage, or to the top of the stage arm.
  • Focus your attention on the "spectrometer" port on the "thin film analyzer" unit.
  • Release the "reflectance" fiber by unscrewing its metal coupling nut. Carefully pull out the fiber out of the connector socket of the "thin film analyzer" unit. The fiber has a metal alignment sleeve around its fiber tip. Do not touch the tip.
  • Remove the black plastic boot (cover) from the "transmittance" fiber and put it on the "reflectance" fiber for protecion.
  • The transmittance fiber has a ceramic alignment sleeve. Align it with the connector socket of the "thin film analyzer" unit and insert it carefully, then screw close the metal coupling nut, but only finger tight.
  • FilMetrics F20 UV FilMetrics F20 UV
    thin film analyzer unit. left: reflectance fiber inserted, right: transmittance fiber inserted.

  • Verify that the recipe is set up for transmittance measurement. As a convention, the recipe name should end in ".XMIT". The recipe must specify in the tab "analysis options" that the "source data" is "transmittance 0°", and in the tab "acquisition settings", where the button "optics" leads to stages, where under the "standard stage" the option "transmittance" must be selected.
  • The "baseline" measeurement for transmission mode is only two stages, first with nothing in the light path, second with the light path completely obstructed (use the tweezers).
  • At the end of your measurement, reconnect the "reflectance" fiber by doing above operations in reverse.