Reservation  -     

Center of MicroNanoTechnology CMi

Wet bench "Coillard"

 Before to start read documents for your safety (SECURITY)

Important things to do before to use wet-benches of CMI

 YOU MUST READ THIS DOCUMENT FIRST : Francais / English

When you hesitate, ask to CMI staff !

 

!! Warning !! All interventions on wet benches are ONLY performed by CMI staff !!


Wet Bench: "Photolitho"
Standard use:

Baths are permanently ready to use on the wet-benches. For each bath, a label indicates the content and the day the products have been changed. In case of problem ( low level, bath life expired, alarm, ...) call the staff. Never change any bath by yourself without staff agreement.

Care: 

! Protect yourself !
Check that the working zone is clean, dry and free of useless equipment !

Available baths are:


Wet Bench: "Gravure"
Standard use:

Care: 

! Protect yourself !
Check that the working zone is clean, dry and free of useless equipment !

Available baths are:

Free Bath:1x bath with thermo-regulation (Sarene module).


Control modules

Normal State: 

Quick Dump Rinse (QDR) : First Rinse

Ultra-Clean (UC) : Final Rinse

Spinner BLE : Drying

Bath control (SARENE module)