Reservation  -     

Center of MicroNanoTechnology CMi



Tousimis Automegasamdri 915B

Tousimis Automegasamdri 915B
Figure 1: Tousimis Automegasamdri 915B

Attention Important to know:
  • Ethanol should be ordered by email or phone to CMi facilities staff (Jean-Marie Voirol or Patrick Madliger) at least half a day before using CPD

I. Introduction CMI

This installation is dedicated for drying freshly released structures with minimum sticking issues (samples are dried in the supercritical point drier using CO2.

II. Supercritical Point Drier CMI

IMPORTANT: Ethanol should be ordered by email or phone to CMi facilities staff (Jean-Marie Voirol or Patrick Madliger) at least half a day before using CPD

Graph
Figure 23: At the very beginning the CO2 is at the liquid phase.
During the HEAT mode, the pressure and the temperature are increased (A -> B -> C) in order to reach the critical phase.
During the BLEED and VENT mode the pressure and the temperature are decreased to reach the gaseous phase (C - > D -> E).