Reservation  -     

Center of MicroNanoTechnology CMi

Ebeam lithography

Electron beam lithography system

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   Vistec EBPG5000, electron beam lithography system
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Manual coaters and developers

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   ATMsse OPTIspin SB20, manual coater, ebeam resists
   Plade, developer, ebeam resist developing
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Hot plates / Ovens / Dryers

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   Präziterm, hot plate, dehydration and soft bake
   Memmert, oven, dehydration and soft bake
   Terra universal cabinet, dryer, to keep equipment clean and dry
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Conferences

Schools

Institutes