Photolithography

• How to select photosensitive resist (PR)
• Resist Table
• Equipment Table

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• Examples and Recommended Process
  • Mask fabrication
    • Cr mask Process Flow
    • DWL200 Easy Exposure Setup
  • Positive PR for deep dry etch and electrodeposition
    • AZ9260 process flow
      • Runcards
      • Coat
      • Expose
      • Data sheet
      • Process debug form
  • Polymer
    • SU8 mold
  • Lift-off
    • LOR double layer
    • nLoF image reversal
  • Other process (Non Photo Sensitive)
    • Polyimide